{Silicon nanostencils with integrated support structures}

Publication Type
Journal Article
Year of Publication
2010
Authors
Fostner, Shawn
Burke, Sarah a.
Topple, Jessica
Mativetsky, Jeffrey M.
Beerens, Jean
Grutter, Peter
Name of Publication
Microelectronic Engineering
Volume
87
Pagination
652–657
ISSN
01679317
Entry URL
http://linkinghub.elsevier.com/retrieve/pii/S0167931709005711
DOI
10.1016/j.mee.2009.09.004
Source URL: https://phas.ubc.ca/silicon-nanostencils-integrated-support-structures